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P04300 - SEMI P43 - Photomask Qualification Terminology Revision:SEMI P43-0304 - Superseded SEMI E159 — Mechanical Specification

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4.8

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Description

SEMI E159 — Mechanical Specification for Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers

Using a test sample weight of 0

SEMI E62に準拠した)ボックスあるいはポッドを扱うだけでなく(SEMI E1

SEMI E54-0316 (technical revision)

such as very fast bipolar switching devices and high power devices

P04300 - SEMI P43 - Photomask Qualification Terminology Revision:SEMI P43-0304 - Superseded SEMI E159 — Mechanical SpecificationThis Standard was technically approved by the global Micropatterning Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13, 2011. Available at www. semiviews. org and www. semi. org in June 2011; originally published March 2004. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines

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