S02900 - SEMI S29 - Guide for Fluorinated Greenhouse Gas (F-GHG) Emission Characterization and Reduction Revision:SEMI S29-0712 - Inactive SEMI E134-1225 (technical revision)

SEMI E134-1225 (technical revision)

purchasing policy may also force procurement from non-certified distributors

It is intended for the benefit of semiconductor device and equipment manufacturers alike so that acquisition

This edition was approved for publication by the global Audits and Reviews Subcommittee on April 15

org 에서 이용 가능하다

S02900 - SEMI S29 - Guide for Fluorinated Greenhouse Gas (F-GHG) Emission Characterization and Reduction Revision:SEMI S29-0712 - Inactive SEMI E134-1225 (technical revision)This Standard was technically approved by the Environmental, Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18, 2012. Available at www. semiviews. org and www. semi. org in July 2012. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are