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the specified bevel angle is used to determine both the regions of the measured edge profile to be fitted and the coordinates of the reference points Ai and Bi
SEMI M64 — Test Method for the El2 Deep Donor Concentration in Semi-Insulating (SI) Gallium Arsenide Single Crystals by Infrared Absorption Spectroscopy
the specifications of SEMI P37 and SEMI P38
including near-edge substrate contamination levels
and development operations
D03400 - SEMI D34 - FPD偏光板の試験方法 StdPbc-0518 the specified bevel angle isglobal Flat Panel Display Materials & Components Committee2010521global Audits and Reviews Subcommittee20106www. semi. org20037 FPD Referenced SEMI Standards None.
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