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Charged wafer and reticle surfaces attract particles (electrostatic attraction [ESA]) and increase the defect rate
as well as the A-LINK Public Specification
but application to other wafer size equipment or non-wafer equipment may be appropriate and should be discussed by supplier and end-user
ESDによる製品，レチクルおよび装置の損傷を低減する。
The Specification of which data items are optional and which are required is not specified in this Document
Semiconductor Chemical Safety Part 3: Extremely Hazardous Chemicals StdPbc-1017 Charged wafer and reticle surfacesCourse Description There are many extremely hazardous chemical categories in semiconductor fabrication, of which you need to be hyper are. Take this course to learn about nine categories, what they are, and what to do in emergencies involving them. Ideal learners are semiconductor employees. Course Objectives Recall important information about nine categories of extremely hazardous chemicals found in semiconductor fabrication. Use data sheets to
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