C00302 - SEMI C3.2 - Specification for Arsine (AsH3) in Cylinders, 99.94% Quality StdTpc-LCD Backlight Unit orgで入手可能となる。初版は1993年発行。前版は2002年11月発行。

orgで入手可能となる。初版は1993年発行。前版は2002年11月発行。

This edition was approved for publication by the global Audits and Reviews Subcommittee on November 24

NOTICE: This Document was completely rewritten in 2016

orgで。初版は2003年11月に発行された。

1 grade nitrogen and argon bulk supply gases

C00302 - SEMI C3.2 - Specification for Arsine (AsH3) in Cylinders, 99.94% Quality StdTpc-LCD Backlight Unit orgで入手可能となる。初版は1993年発行。前版は2002年11月発行。This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www. semiviews. org and www. semi. org in February 2018; originally published in 1992; previously published June 2011. The purpose of this Document is to provide specifications for arsine (AsH3) that is used in the semiconductor industry. This Document