MF015400 - SEMI MF154 - Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces StdTpc-Mass Flow Controllers In the case of a

In the case of a guide

a perspective on equipment market trends

orgで入手可能となる。初版は1995年発行。前版は2002年3月発行。

SEMI M73-1013 (technical revision)

The test is intended to accelerate the corrosion while simulating conditions that may be found within process equipment and gas systems in the semiconductor industry

MF015400 - SEMI MF154 - Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces StdTpc-Mass Flow Controllers In the case of aThe purpose of this Guide is to list, illustrate, and provide reference for various characteristic features and contaminants that are seen on highly specular silicon wafers. Ambiguities and uncertainties regarding surface defects may be resolved by reference to this Guide. There is close alignment between this Guide and common specifications used for the purchase of silicon wafers. This Guide contains a compilation of the most commonly observed