P00600 - SEMI P6 - Specification for Registration Marks for Photomasks StdTpc-Automation Technology This includes the coordination

This includes the coordination

orgで入手可能になり，2003年11月発行に至る。初版は1996年発行。

including the etching steps required to release the beams

This standard was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee

ロードおよびアンロードは，何らかのシステムまたは装置（人が運転する搬送車または高架ホイスト車など）を使って半自動および自動モードで行なわれることを想定している。

P00600 - SEMI P6 - Specification for Registration Marks for Photomasks StdTpc-Automation Technology This includes the coordinationThis standard was technically approved by the global Micropatterning Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 25, 2007. It was available at www. semi. org in June 2007. Originally published in 1988. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available