E11400 - SEMI E114 - Test Method for RF Cable Assemblies Used in Semiconductor Processing Equipment RF Power Delivery Systems StdTpc-Mask and Mask Equipment This edition was approved for

This edition was approved for publication by the global Audits and Reviews Subcommittee on August 27

this Standard provides equipment suppliers with definitions and limitations on the footprint occupied by production equipment during operation

and the mixture 70wt% PGME/30wt% PGMEA which are used as solvents in the semiconductor industry for advanced resist technology

1  This Guide applies to BCDS used in semiconductor manufacturing facilities for supplying liquid chemicals to wafer manufacturing processes

SEMI D65-0719 (Reapproved 0925)

E11400 - SEMI E114 - Test Method for RF Cable Assemblies Used in Semiconductor Processing Equipment RF Power Delivery Systems StdTpc-Mask and Mask Equipment This edition was approved forThe purpose of this Standard is to define a test method used to determine the electrical length, power losses, and characteristic impedance variation of RF cable assemblies used in RF power delivery systems for semiconductor processing equipment. This Standard specifies the testing procedures and test equipment required for the following: Determining the electrical length of RF cable assemblies at the nominal operating frequency in terms of degrees of