F02700 - SEMI F27 - Test Method for Moisture Interaction and Content of Gas Distribution Systems and Components by Atmospheric Pressure Ionization Mass Spectrometry (APIMS) StdPbc-1011 Both of these features depend

Both of these features depend upon the nature and fabrication of the test structures used for the test method

because the constant current TDDB method is less influenced by parasitic resistance in the measurement circuit than is the constant-voltage TDDB method

7  For reference purposes

This Standard specifies the peeling force test with terms and definitions

5  These test methods also have been applied to the determination of the width of the denuded zone in silicon wafers

F02700 - SEMI F27 - Test Method for Moisture Interaction and Content of Gas Distribution Systems and Components by Atmospheric Pressure Ionization Mass Spectrometry (APIMS) StdPbc-1011 Both of these features dependNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Test Method will determine the quantity of removable moisture and the degree of interaction with trace concentrations of gas phase moisture, of gas distribution systems and components. atmospheric pressure ionization