M03000 - SEMI M30 - Standard Test Method for Substitutional Atomic Carbon Concentration in GaAs by Fourier Transform Infrared Absorption Spectroscopy StdPbc-0114 3-0698 (first published)

3-0698 (first published)

付属書2 － シグナルワードの翻訳

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SEMI MF1451-92 (Reapproved 1999) (first SEMI publication)

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M03000 - SEMI M30 - Standard Test Method for Substitutional Atomic Carbon Concentration in GaAs by Fourier Transform Infrared Absorption Spectroscopy StdPbc-0114 3-0698 (first published)This standard was technically approved by the global Compound Semiconductor Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 19, 2008. It was available at www. semi. org in February 2009. Originally published in 1997. NOTICE: This document was balloted and approved for withdrawal in 2009. The purpose of this document is to test substitutional atomic carbon concentration in GaAs by Fourier