D01600 - SEMI D16 - Specification for Mechanical Interface Between Flat Panel Display Material Handling System and Tool Port StdDcs-Current 此類名稱與定義說明了使用在液晶顯示器光源之背光模組的各種元件和特性。本標準有助於統一使用在背光模組的專用術語，以節省製造成本和時間，而改善製造效率。

此類名稱與定義說明了使用在液晶顯示器光源之背光模組的各種元件和特性。本標準有助於統一使用在背光模組的專用術語，以節省製造成本和時間，而改善製造效率。

SEMI F48 — Test Method for Determining Trace Metals in Polymer Materials

tetrakis(diethylamino) hafnium and tetrakis(ethylmethylamino) hafnium which are used in the semiconductor industry for the deposition of hafnium oxide based layers by atomic layer deposition

SEMI MF928 — Test Method for Edge Contour of Circular Semiconductor Wafers and Rigid Disk Substrates

本書の目的は，(1) 20/0

D01600 - SEMI D16 - Specification for Mechanical Interface Between Flat Panel Display Material Handling System and Tool Port StdDcs-Current 此類名稱與定義說明了使用在液晶顯示器光源之背光模組的各種元件和特性。本標準有助於統一使用在背光模組的專用術語，以節省製造成本和時間，而改善製造效率。This Specification defines feature requirements on and about tool ports of process tools used in manufacturing of flat panel displays. These feature requirements facilitate the interfacing of transport equipment to the tool by standardizing the feature requirements. Such standards are intended to promote cost effective interfacing while preserving freedom of choice in material handling equipment. Referenced SEMI Standards SEMI D5 Standard Size for