E05415 - SEMI E54.15 - Specification for Sensor/Actuator Network Communications for SafetyBUS p StdPbc-0624 The SECS-I Standard defines a

The SECS-I Standard defines a communication interface suitable for the exchange of messages between semiconductor processing equipment and a host

SEMI E134-0709 (technical revision)

The chemical carbon content in GaAs may be higher than the substitutional carbon content CAs as measured by this Standard

The assumption of wafer-to-wafer (W2W)

SEMI F45-0699 (first published)

E05415 - SEMI E54.15 - Specification for Sensor/Actuator Network Communications for SafetyBUS p StdPbc-0624 The SECS-I Standard defines aNOTICE: This Standard was balloted and approved for withdrawal in 2024. This Standard defines a communication specification based on the SafetyBUS p protocol to enable communications between intelligent devices on a sensor actuator network (SAN) that operate according to SEMI specified device models (common and device specific) in a semiconductor manufacturing equipment. This Standard specifies the protocol and services that compliant intelligent