F01300 - SEMI F13 - Guide for Gas Source Control Equipment Revision:SEMI F13-1101 - Inactive SEMI F85 — Specification for

SEMI F85 — Specification for Dimension of One Port Components for 1

The purpose of this guide is to provide the semiconductor industry with the general knowledge and background information for understanding the principles of exhaust systems

本スタンダードは，global Physical Interfaces & Carriers Committeeで技術的に承認されている。現版は2010年8月27日，global Audits and Reviews Subcommitteeにて発行が承認された。2010年10月に www

to facilitate the use of different automated transport systems in order to meet the different material handling requirements found throughout the factory

SEMI E87-0619 (technical revision)

F01300 - SEMI F13 - Guide for Gas Source Control Equipment Revision:SEMI F13-1101 - Inactive SEMI F85 — Specification forThis guide was technically approved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on August 27, 2001. Initially available at www. semi. org September 2001; to be published November 2001. Originally published in 1993. The purpose of this document is to provide a guide for the design and operational requirements