M04900 - SEMI M49 - 130 nmから65 nmへの技術世代のシリコンウェーハ用ジオメトリ測定システム規定のためのガイド Revision:SEMI M49-0311 - Superseded 2 megapascals (MPa) [29 pounds

2 megapascals (MPa) [29 pounds per square inch (psi)] back pressure

この安全ガイドラインは，サイズによってFLDを特定する方法を提供する。

SEMI S14-0704 (technical revision)

Specification for manual valves should be separately provided as needed

SEMI C28 — Specifications for Hydrofluoric Acid

M04900 - SEMI M49 - 130 nmから65 nmへの技術世代のシリコンウェーハ用ジオメトリ測定システム規定のためのガイド Revision:SEMI M49-0311 - Superseded 2 megapascals (MPa) [29 poundsInternational Technology Roadmap for Semiconductors 1999 edition ITRS1309065 nmSEMI M1SEMI M8SEMI M11SEMI M24SEMI M38 Referenced SEMI Standards SEMI E1. 9 Mechanical Specification for Cassettes Used to Transport and Store 300 mm WafersSEMI E5 Specification for SEMI Equipment Communications Standard 2 Message Content (SECS II)SEMI E10 Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and