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SEMI E126-0708 (Reapproved 0613)
SEMI F39-0315 (complete rewrite)
This Guide can be applied to inline equipment as well as batch equipment
SEMI E10-0701 (technical revision)
本文書は，MFCの取付けの影響を試験し，記述することに関し，メーカーとユーザ間のコミュニケーションに共通のベースを提供するものである。
P00500 - SEMI P5 - ペリクルの仕様 Revision:SEMI P5-0704 - Superseded SEMI E126-0708 (Reapproved 0613)Global Micropatterning CommitteeNorth American Microlithography Committee2004422North American Regional Standards Committee20046www. semi. org2004719861994 2004SEMI P5SEMI P5. 1SEMI P5. 2 , Referenced SEMI Standards None.
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