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SEMI C30-0218 (technical revision)
18-0914 (Reapproved 1125)
with the extensive combined use of Automated Material Handling Systems (AMHS)
SEMI E16-90 (first published)
Make the design of user security systems easier and more robust by providing knowledge of the role and responsibility of equipment in the factory
E16900 - SEMI E169 - Guide for Equipment Information System Security Revision:SEMI E169-0615 - Superseded SEMI C30-0218 (technical revision)The purpose of this Standard is to establish a common basis for equipment information system security. This can be shared among users and suppliers of semiconductor manufacturing equipment, suggesting concepts, and measures of information security. This Standard is expected to: Provide guidelines of applying appropriate security measures for equipment to optimize cost, delivery, and reliability. Make the design of user security systems easier and more
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