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M03600 - SEMI M36 - 低転位密度GaAs基板のエッチピット密度（EPD）測定方法 Revision:SEMI M36-0699 - Inactive the successor to the International

SKU: 77286515890
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Description

the successor to the International Technology Roadmap for Semiconductors (ITRS)

This Standard covers 300 mm equipment only

polycarbonate

FPD基板のパターン表面上における各範囲を規定し，更にそれらの関係について述べたものである。それは他のSEMI FPD関連文書の用語およびバンキングコンベンションを想定している。

SEMI G93-0412 (first published)

M03600 - SEMI M36 - 低転位密度GaAs基板のエッチピット密度（EPD）測定方法 Revision:SEMI M36-0699 - Inactive the successor to the InternationalGlobal Compound Semiconductor Committee199931719994SEMI On Line19996 GaAsEPD Referenced SEMI Standards None.

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