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SEMI M61 — Specification for Silicon Epitaxial Wafers with Buried Layers
現在使用できる最も正確で，信頼できる水分分析器を，ppmレンジで主に操作するとき，このテストは，このレンジにおける標準水分の妥当性検査に関心を集めている。ppm水分標準のアウトプットをppbレンジに減らすための手順を詳細に述べることにより，このppb標準水分の必要性が取り扱われる。
SEMI G91-0513 (first published)
This Standard serves as a reference for both HB-LED manufacturers and equipment suppliers
SEMI E5-0703 (technical revision)
E04400 - SEMI E44 - Guide for Procurment and Acceptance of Minienvironments StdTpc-FPD Masks SEMI M61 — Specification forNOTICE: This Document was balloted and approved for withdrawal in 2001. It is widely felt that the requirements of buyers can be standardized. The purpose of this guide is to provide standardized procedures for the procurement and acceptance of minienvironments. It should assist the buyer in producing a procurement specification by providing a comprehensive and structured overview and checklists of all the parameters relating to procurement of
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