MF139200 - SEMI MF1392 - Test Method for Determining Net Carrier Density Profiles in Silicon Wafers by Capacitance-Voltage Measurements with a Mercury Probe StdPbc-0622 The purpose of this Standard

The purpose of this Standard is to standardize requirements for n-methyl 2-pyrrolidone used in the semiconductor industry and testing procedures to support those specifications

they are only used for limited types of Mura and are not practical in real varied cases

Initial filter cleanliness

SEMI E111-0304 (technical revision)

SEMI E6-82 (first published)

MF139200 - SEMI MF1392 - Test Method for Determining Net Carrier Density Profiles in Silicon Wafers by Capacitance-Voltage Measurements with a Mercury Probe StdPbc-0622 The purpose of this StandardThis Test Method covers the measurement of net carrier density and net carrier density profiles in epitaxial and polished bulk silicon wafers in the range from about 4 1013 carriers cm3 to about 8 1016 carriers cm3 (resistivity range from about 0. 1 cm to about 100 cm in n type wafers and from about 0. 24 cm to about 330 cm in p type wafers). This Test Method requires the formation of a Schottky barrier diode with a mercury probe contact to an