F01700 - SEMI F17 - Specification for High Purity Quality Electropolished 316L Stainless Steel Tubing, Component Tube Stubs, and Fittings Made from Tubing StdPbc-0321 semiconductor monosilicon and semiconductor polysilicon

semiconductor monosilicon and semiconductor polysilicon

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NOTICE: This Document is no longer published with the SEMI E54 suite of Standards

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F01700 - SEMI F17 - Specification for High Purity Quality Electropolished 316L Stainless Steel Tubing, Component Tube Stubs, and Fittings Made from Tubing StdPbc-0321 semiconductor monosilicon and semiconductor polysiliconThis specification was technically reapproved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on October 25, 2002. Initially available at www. semi. org December 2002; to be published March 2003. Originally published in 1995. NOTICE: This document was balloted and approved for withdrawal in 2004. The purpose of this