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org in November 2010
SEMI E134 — Specification for Data Collection Management (DCM)
and maintainability (RAM) and utilization performance of equipment in a manufacturing environment
Mechanical Properties
SEMI E17 — Guideline for Mass Flow Controller Transient Characteristics Tests
E14300 - SEMI E143 - 50Ωの負荷に対する出力変動の測定およびすべての位相角において電圧定在波比が2.0の負荷に対する出力変動とスペクトルを測定するための試験方法 StdTpc-Surface Mount Gas Distribution Systems org in November 2010NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Metrics Global Technical Committee20111224global Audits and Reviews Subcommittee20125www. semiviews. org www. semi. org20063 : SEMI E113 (RF) RF RFRF3SEMI E113 RF (50 ) 1% () RF10%100%0. 33 (VSWR2. 0) 1. 5%() 10%100%0. 33 (VSWR2. 0)
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