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• Exhaust and other process effluents
capacity and spending plans of leading device makers and foundries
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89 mm wall (1/4 in
C01900 - SEMI C19 - Specification for Acetone StdTpc-Automation Technology • Exhaust and other processNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to standardize requirements for acetone used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically
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