G07900 - SEMI G79 - Specification for Overall Digital Timing Accuracy Revision:SEMI G79-0200 - Inactive 1-0318 (technical revision)

1-0318 (technical revision)

This Guide defines the quality area of FPD masks

3 — Standard Mechanical Interface (SMIF)

For each of these

This Standard specifies the physical and electrical interfaces for turbomolecular pump (TMP) type vacuum pumps

G07900 - SEMI G79 - Specification for Overall Digital Timing Accuracy Revision:SEMI G79-0200 - Inactive 1-0318 (technical revision)This Standard was technically approved by the global Automated Test Equipment Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www. semiviews. org and www. semi. org in May 2012; originally published February 2000. This Standard is intended to provide a minimum common definition of timing accuracy specifications for semiconductor automatic test equipment