F07900 - SEMI F79 - ガス配送コンポーネントに使用されるガスのシリコンとの適合性に関するガイド Revision:SEMI F79-0710 - Superseded SEMI E90-0624 (technical revision)

SEMI E90-0624 (technical revision)

environment

本安全基準著重於半導體或平面顯示器工廠內部過氧化氫的貯存、處理、運送及輸送作業。

This Specification defines a common approach for gathering and combining data to support the reduction of cycle time through the identification and elimination of product time waste in the factory life cycle of a product unit

and as the result (2) to provide magnification references which are easy for anyone to use

F07900 - SEMI F79 - ガス配送コンポーネントに使用されるガスのシリコンとの適合性に関するガイド Revision:SEMI F79-0710 - Superseded SEMI E90-0624 (technical revision)global Gases Committee2010430global Audits and Reviews Subcommittee20106www. semi. org20037 2010 Referenced SEMI Standards SEMI E52 Practice for Referencing Gases, Gases Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers