E05424 - SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen) StdPbc-1218 2 — Guide for the

2 — Guide for the Qualification of Polymer Assemblies Used in Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment

This Specification provides the structure of SEMIs Sensor/Actuator Network (SAN) Standard

ここで扱う用語と定義は，

SEMI E133-0705 (technical revision)

In general

E05424 - SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen) StdPbc-1218 2 — Guide for theThis Standard describes a specific device structure and behavior of a generic equipment networked sensor. This could include a sensor added onto the equipment that communicates over a sensor actuator communication network. It could also include a sensor that is part of the default configuration of the equipment, communicating over a sensor actuator communication network. This Standard is applicable to sensors which are regarded as data producers only.