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P00200 - SEMI P2 - ハードサーフェス・フォトマスク用クロムブランク Revision:SEMI P2-0308 - Inactive This Guide provides a framework

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Description

This Guide provides a framework for communicating specific values limiting feature levels and/or densities as agreed upon between suppliers and users

種々のチューブフィッティング間または製造者間における比較のためにこの方法を使用する場合には,ユーザは評価されるべきチューブおよびチューブフィッティングを明確に選択しなければならない。

The purpose of this Document is to provide a series of specifications for different grades of argon (Ar) that are used in the semiconductor industry

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5 — Guide for the Design of Ultrahigh Purity Solvent Distribution Systems with Non-Metallic Fluid Paths in Semiconductor Manufacturing Equipment

P00200 - SEMI P2 - ハードサーフェス・フォトマスク用クロムブランク Revision:SEMI P2-0308 - Inactive This Guide provides a frameworkNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI global Micropatterning Committee2008118global Audits and Reviews Subcommittee20082www. semi. org1998 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met.

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