C05800 - SEMI C58 - Specification for Hydrogen Revision:SEMI C58-1116 - Current This document describes standard behaviors

This document describes standard behaviors for automated transfer of substrates among automated material handling systems (AMHS) and equipment at FPD fabs

which is determined by the amount of moisture taken up by the component and subsequently released in any exposure after receipt during its operation independently or as part of a gas delivery system

Flat Panel Display - Factory Automation Global Technical Committeeで技術的に承認されている。現版は2008年5月13日，global Audits and Reviews Subcommitteeにて発行が承認された。2008年6月にwww

This test is optional and may be omitted based on the objective of the testing

to be published September 1999

C05800 - SEMI C58 - Specification for Hydrogen Revision:SEMI C58-1116 - Current This document describes standard behaviorsThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www. semiviews. org and www. semi. org in November 2016; originally published March 2005; previously published December 2013. The purpose of this Document is to provide a series of specifications for different grades of hydrogen (H2) that are used in the