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C00100 - SEMI C1 - Guide for the Analysis of Liquid Chemicals StdDcs-Superseded SEMI M45 — Specification for

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Description

SEMI M45 — Specification for 300 mm Wafer Shipping System

SEMI C96-1121 (technical revision)

due to the migration to large substrate sizes in FPD production

equipment engineers

SEMI F49-0200 (Reapproved 1108)

C00100 - SEMI C1 - Guide for the Analysis of Liquid Chemicals StdDcs-Superseded SEMI M45 — Specification forLiquid Chemicals are used extensively during the production of semiconductor devices; their purity has been shown to affect the device yield during the manufacturing processes. Since there is a wide range of semiconductor devices being produced, different levels of purity have been established as standards and guidelines for each liquid chemical. This Guide describes the various analytical procedures for standards verification procedures required to

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