M04500 - SEMI M45 - Specification for 300 mm Wafer Shipping System StdVol-Silicon Materials & Process Control SEMI E168-0915 (designation update)

SEMI E168-0915 (designation update)

SEMI D19-1019 (Reapproved 0125)

1  This Standard establishes practices for measuring characteristics of resin black matrix (BM) with high resistance for FPD color filter

本スタンダードは，global Gases Committeeで技術的に承認されている。現版は2009年12月16日，global Audits and Reviews Subcommitteeにて発行が承認された。2010年2月にwww

Reticle transfers to/from lithography production equipment internal reticle library space

M04500 - SEMI M45 - Specification for 300 mm Wafer Shipping System StdVol-Silicon Materials & Process Control SEMI E168-0915 (designation update)This Standard was technically approved by the Silicon Wafer Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www. semiviews. org and www. semi. org in August 2017; originally published March 2001; previously published November 2010. This Standard stipulates transport related materials and systems to minimize the total cost relating to transport of 300 mm