C00358 - SEMI C3.58 - Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality Revision:SEMI C3.58-0600 - Superseded where at least one is

where at least one is a device wafer

SEMI D60 — Test Method of Surface Scratch Resistance for FPD Polarizing Film and Its Materials

SEMI C64-0308 (Reapproved 1214)

It is the responsibility of the users of the Documents to establish appropriate safety and health practices

The scope of this Specification is grades of buffered oxide etchants used in the semiconductor industry

C00358 - SEMI C3.58 - Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality Revision:SEMI C3.58-0600 - Superseded where at least one isThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 0217. Available at www. semiviews. org and www. semi. org in April 2018; originally published June 2000; previously published October 2011. The purpose of this Document is to provide specification for octafluorocyclobutane (C4F8), that is used in the semiconductor