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SEMI E83-0515 (technical revision)
フォーマット
Such targets are used to align two patterned wafers prior to an operation that bonds them together
9-0298 (Withdrawn 0303) - replaced by SEMI E49
and refers to some of the many international codes
M07600 - SEMI M76 - Specification for Developmental 450 mm Diameter Polished Single Crystal Silicon Wafers Revision:SEMI M76-0710 - Inactive SEMI E83-0515 (technical revision)This standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30, 2010. Initially available at www. semi. org in June 2010. The developmental wafers covered by this specification are intended for use in research and development of process and metrology equipment and fabrication processes required for manufacturing high density integrated
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