F08800 - SEMI F88 - Specification for Dimension of Standard Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems StdPbc-0224 SEMI M55-0303 (first published)

SEMI M55-0303 (first published)

This method is for UHP efficient removal of low-level contaminants

not an authoring specification or an electronic presentation specification

本仕様は， CMOS大規模集積回路（LSI： large scale integrated circuit）デバイス用の薄膜シリコン・オン・インシュレーター（SOI： silicon-on-insulator）ウェーハの要求条件を規定するものである。本仕様は，130nm技術ノード以降（65nm，45nm等）のLSI用200mmおよび300mmウェーハを対象としている。150mmウェーハの場合には，旧来のLSI世代も含まれる。パラメータ，検査手順および受入基準を規定することにより，サプライヤと顧客双方が，製品の特性および品質要求条件を一貫して定義するのがよい。

see SEMI AUX022

F08800 - SEMI F88 - Specification for Dimension of Standard Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems StdPbc-0224 SEMI M55-0303 (first published)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 This Standard establishes the properties and physical dimensions of mass flow controllers and mass flow meters for 1. 5 inch type surface mount gas distribution systems. 2 Scope 2. 1 This Standard includes