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and for materials acceptance purposes
1 — Specification for 300 mm Tool Load Port
The measurement requires the fabrication of a guard-ring MOS capacitor (refer to Figure 1)
polypropylene (PP)
The physical specification may be standardized separately
P01000 - SEMI P10 - フォトマスクオーダーのデータ構造の仕様 StdTpc-Automation Technology and for materials acceptance purposesglobal Micropatterning Committee2008513global Audits and Reviews Subcommittee20066www. semi. org20087CD ROM199020077 Referenced SEMI Standards SEMI P1 Specification for Hard Surface Photomask Substrates SEMI P2 Specification for Chrome Thin Films for Hard Surface Photomasks SEMI P4 Specification for Round Quartz Photomask Substrates SEMI P5 Specification for Pellicles SEMI P6 Specification for Registration Marks for Photomasks SEMI P21 Guidelines for
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