C03200 - SEMI C32 - メチルエチルケトンの仕様 Revision:SEMI C32-0306 (Reapproved 0611) - Inactive Originally published in 1986

Originally published in 1986

applied to all substrates

CP uses a stylus or probe tip that interacts with the surface of interest and moves at a known speed across the surface while recording the up and down movement of the tip relative to the surface

The purpose of this Specification is to standardize requirements for methanol used in the semiconductor industry and testing procedures to support those standards

it makes sense to use the same wafer support configuration when measuring TTV

C03200 - SEMI C32 - メチルエチルケトンの仕様 Revision:SEMI C32-0306 (Reapproved 0611) - Inactive Originally published in 1986global Liquid Chemicals Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org197820063 : Referenced SEMI Standards SEMI C1 Guide for the Analysis of Liquid Chemicals