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SEMI T10-0701 (Reapproved 0912)
It was developed for use with silicon wafers of 150 mm diameter or less with standard diameter and fiducial positions as given in SEMI M1
These conversions are useful in mathematical modeling of semiconductor processing and devices
SEMI E47 — Specification for 150 mm/200 mm Pod Handles
metrology methods
E14400 - SEMI E144 - 半導体製造装置および材料ハンドリング装置におけるキャリア内のRFIDタグとRFIDリーダの間の無線インタフェースの仕様 Revision:SEMI E144-0312 - Inactive SEMI T10-0701 (Reapproved 0912)global Physical Interfaces & Carriers Technical Committee20111224global Audits and Reviews Subcommittee20123www. semiviews. org www. semi. org2005320063 RF2006100 % 134. 2 kHzHDX RFID RFID ISO IEC 18000 02 RFID 21) RI TRP DR2B HDX MPT2) ISO IEC 18000 02 Type B (HDX) Referenced SEMI Standards None.
