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SEMI E90-0312 (technical revision)
SEMI E16-0224 (technical revision)
and components
1-0302 (first published)
6-0710 (Reapproved 0815)
E15100 - SEMI E151 - Guide for Understanding Data Quality Revision:SEMI E151-1110 - Superseded SEMI E90-0312 (technical revision)This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www. semiviews. org and www. semi. org in May 2017; originally published March 2009; previously published December 2011. The purpose of this Guide is to provide common terminology and definitions that can be used when addressing the
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