F05200 - SEMI F52 - 半導体及びFPD製造の薬液供給システム用メトリックPFAチューブの寸法仕様 Revision:SEMI F52-1101 - Inactive It is the intent of

It is the intent of this Standard to be fully compatible with SEMI E4

and procedure used to measure the resistance of leads in packaging elements

and doped polysilicon—are displaying characteristics that are unacceptable for upcoming technology nodes

3  These methods are destructive

while polished wafers may exhibit several forms of crystallographic defects or surface damage

F05200 - SEMI F52 - 半導体及びFPD製造の薬液供給システム用メトリックPFAチューブの寸法仕様 Revision:SEMI F52-1101 - Inactive It is the intent ofNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Liquid Chemical Distribution Systems Committee200011420018www. semi. org20011120006 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive