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calibration procedures
The test is performed with designed mini modules in a pressure cooker with moisture condensing or moisture saturated steam environments
or any other interested party
1 The purpose of this Practice is to provide procedures for welding stainless steels and other corrosion resistant metals and alloys (CRAs) for fluid (liquid or gas) distribution systems in semiconductor manufacturing applications
• Polycrystalline silicon (refer to SEMI M16 or JEITA EM-3601A)
E04800 - SEMI E48 - Specification for SMIF Indexer Volume Requirement Revision:SEMI E48-95 (Reapproved 0600) - Superseded calibration proceduresNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Specification is to provide the volume required within a tool that enables integration of SMIF into tools with single or multiple ports. This Specification defines the space necessary within a tool with
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