E09100 - SEMI E91 - Specification for Prober Specific Equipment Model (PSEM) StdVol-Automation Technology 2 This Standard defines distance

2 This Standard defines distance factor

general procedures

注意：　本文書は，編集上の修正を伴い，再承認された。

The purpose of this Standard is to provide Wafer Job Object (WJOBJ) model so that the information that should be managed in conjunction with the WJ can be encapsulated in the object and can be accessed from the host

SEMI C44-1223 (technical revision)

E09100 - SEMI E91 - Specification for Prober Specific Equipment Model (PSEM) StdVol-Automation Technology 2 This Standard defines distance*This Safety Guideline has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is official and authoritative version. 1