M01000 - SEMI M10 - Terminology for Identification of Structures and Features Seen on Gallium Arsenide Wafers StdTpc-Sensor Actuator Network 本スタンダードは，global Gases Technical Committeeで技術的に承認されている。現版は2011年12月24日，global Audits

本スタンダードは，global Gases Technical Committeeで技術的に承認されている。現版は2011年12月24日，global Audits and Reviews Subcommitteeにて発行が承認された。2012年2月にwww

It includes a specific transfer command state model and transport and storage system controller (TSSC) state model as the basis for all equipment of this class

1-1108 (technical revision)

together with test methods suitable for determining their magnitude where such procedures are documented

and charged particle activation analysis

M01000 - SEMI M10 - Terminology for Identification of Structures and Features Seen on Gallium Arsenide Wafers StdTpc-Sensor Actuator Network 本スタンダードは，global Gases Technical Committeeで技術的に承認されている。現版は2011年12月24日，global AuditsThe purpose of this Standard is to list, illustrate, and define various characters, features, and contaminants that are seen on highly polished GaAs wafers and present recommended practices for observation of these defects. These occurrences are frequently referred to as surface defects. The defects and common synonyms are arranged alphabetically in 4, and each structure is referred to by its most common name and, in some cases, probably origins. Two