E07000 - SEMI E70 - Guide for Tool Accommodation Process StdTpc-Equipment Models 1 The diameters of the

1  The diameters of the different wafers that comprise the stack may differ from each other

but common across multiple standards

SEMI E123-0703 (Reapproved 1109)

This Test Method is intended to be applied to the wetted surfaces of stainless steel tubing

SEMI C35-0708 (technical revision)

E07000 - SEMI E70 - Guide for Tool Accommodation Process StdTpc-Equipment Models 1 The diameters of theThis Guide provides an overview of the various elements of Tool Accommodation, a methodology by which semiconductor processing equipment is installed in a cost effective and timely manner. This addition to the SEMI Tool Accommodation Standards set describes the process by which the referenced SEMI Standards can be effectively used to achieve tool installation cost and schedule goals. This overview Guide provides process development, facilities,