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製造装置上のトランスファポイント（受け渡しポジション）のオブジェクトへのサービスコマンド
SEMI MF950-1107 (Reapproved 0912)
in particular orientation
SEMI MS4-0212 (technical revision)
if the wafers are perfectly square or pseudo-square
E08600 - SEMI E86 - Provisional Specification for CIM Framework Factory Labor Component StdTpc-3DS-IC 製造装置上のトランスファポイント（受け渡しポジション）のオブジェクトへのサービスコマンドThis specification was technically approved by the global Information & Control Committee and is the direct responsibility of the North American Information & Control Committee. Current edition approved by the North American Regional Standards Committee on October 21, 1999. Initially available at www. semi. org January 2000; to be published February 2000. Originally published September 1999. The Factory Labor Component provides the capability to
