E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates Revision:SEMI E16-0224 - Superseded 7-95 (first published)

7-95 (first published)

SEMI E148-1109 (technical revision)

device manufacturer

3  This Specification is applicable to any manufacturing equipment that handles substrates

critical pitting temperature) in addition to a qualitative (i

E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates Revision:SEMI E16-0224 - Superseded 7-95 (first published)The purpose of this Guide is to establish a uniform, worldwide means for describing and measuring leak rates of mass flow controllers (MFCs). The leak integrity of a gas delivery system is important to maintaining product quality and performance. This Guide is intended to prevent confusion and misunderstanding between manufacturers and users. In particular, it distinguishes between mechanical and diffusion leak rates. This Guide contains definitions