E13100 - SEMI E131 - Specification for the Physical Interface of an Integrated Measurement Module (IMM) into 300 mm Tools Using Bolts-M Revision:SEMI E131-0304 - Superseded In order to improve the

In order to improve the compatibility

such as identification for both sides of films

This Document provides the terms and definitions of a physical transformation when flat panel display (FPD) substrates are maintained statically

orgで，そして2008年3月にCD-ROMで入手可能となる。初版は2003年7月発行，前版は2007年11月に発行された。

This database offers access to and insights into global OSAT facilities in China

E13100 - SEMI E131 - Specification for the Physical Interface of an Integrated Measurement Module (IMM) into 300 mm Tools Using Bolts-M Revision:SEMI E131-0304 - Superseded In order to improve theNOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Document establishes the specification for the interface requirements between an integrated measurement module (IMM) and 300 mm tools using an interface as defined by SEMI E63 (BOLTS M). This Standard will permit the tool