C00329 - SEMI C3.29 - Standard for Nitrogen (N2), Bulk Gaseous, 99.9995% Quality Revision:SEMI C3.29-0200 (Withdrawn 0303) - Replaced NOTICE: This document was balloted

NOTICE: This document was balloted and approved for withdrawal in 2010

1 This standard specifies extraction limits for metals from liquid chemical distribution system components (e

orgで入手可能になり，2003年7月発行に至る。初版は1995年発行。

org in July 2004

associated with its use

C00329 - SEMI C3.29 - Standard for Nitrogen (N2), Bulk Gaseous, 99.9995% Quality Revision:SEMI C3.29-0200 (Withdrawn 0303) - Replaced NOTICE: This document was ballotedThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 15, 1999. Available at www. semi. org in September 1999; originally published in 1986; previously published in 1996. NOTICE: This Document was balloted and approved for withdrawal in 2003; it has been replaced by SEMI C59. Nitrogen is an odorless, tasteless, diatomic gas