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acetal resin
SEMI E29-93 (Reapproved 0299)
5-1104 (technical revision)
この文書は，触針式，光学触針式測定器および光学干渉計式平面度測定器を使用した，FPDガラス基板の表面うねりの測定方法について規定する。
Products which meet all of the requirements may be described as ‘meeting SEMI Specifications
E09400 - SEMI E94 - 컨트롤 잡 관리 사양 Revision:SEMI E94-0314 - Superseded acetal resinThis Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at www. semiviews. org and www. semi. org in March 2014; originally published February 2000; previously published July 2013. This Specification describes equipment provided services to the factory that supports a high level of factory
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