MF004300 - SEMI MF43 - Test Method for Resistivity of Semiconductor Materials StdPbc-0998 Depending on the intended application

Depending on the intended application

SEMI G63-95 (first published)

SEMI MF1530-0707 (Reapproved 1018)

2 The GEM Standard is intended to specify the following:

SEMI M64-0915 (technical revision)

MF004300 - SEMI MF43 - Test Method for Resistivity of Semiconductor Materials StdPbc-0998 Depending on the intended applicationThe resistivity of a semiconductor material is an important materials acceptance requirement. Resistivity determinations made during device fabrication are also widely used for quality control purposes. This Test Method covers two procedures which are widely used for making routine measurements. The two test methods in this Standard are as follows: Method A, Two Probe and Method B, Four Probe. In general, resistivity measurements are most reliable