E11700 - SEMI E117 - Specification for Reticle Load Port StdTpc-Automated Material Handling Systems Changes were made to Section

Changes were made to Section 4

product types

Temperature

SEMI E125-0308 (designation update)

SEMI E134-0305 (designation update)

E11700 - SEMI E117 - Specification for Reticle Load Port StdTpc-Automated Material Handling Systems Changes were made to SectionNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification defines dimensional requirements and options of reticle load ports on reticle stockers, lithography exposure equipment, and reticle inspection equipment. It is intended to promote a uniform physical