C05700 - SEMI C57 - Specification for Argon StdTpc-Process Chemicals - Solvents This edition was approved for

This edition was approved for publication by the global Audits and Reviews Subcommittee on August 25

1 mmがすべての基板に適応する。

本文書の目的は，半導体産業で使用されるトリメチルホスフィンに対する要求条件を標準化し，またこれらのスタンダードをサポートする試験手順を標準化することである。試験方法は，統計的に有効な結果を示している。

本文書は，

1  The purpose of this Test Method is to standardize the method for measurement of heat resistance in color filters used for flat panel displays (FPD)

C05700 - SEMI C57 - Specification for Argon StdTpc-Process Chemicals - Solvents This edition was approved forThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www. semiviews. org and www. semi. org in March 2017; originally published March 2005; previously published February 2011. The purpose of this Document is to provide a series of specifications for different grades of argon (Ar) that are used in the