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SEMI C56-0305 (Reapproved 0211)
which refer to this Standard
respectively
evaluating utility system enhancements
Maintenance
P01000 - SEMI P10 - Specification of Data Structures for Photomask Orders StdTpc-Chemical & Gas General Specifications SEMI C56-0305 (Reapproved 0211)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. These data structure specifications are intended to facilitate the transmittal of mask order data between software systems to allow: automated order placement by mask customers and to allow the automatic processing of such
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